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发明名称	WET ETCHING DEVICE
摘要
申请公布号	JPH0461329(A)	申请公布日期	1992.02.27
申请号	JP19900173683	申请日期	1990.06.29
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	DANSUI YOSHITAKA
分类号	C23F1/08;H01L21/304;H01L21/306	主分类号	C23F1/08
代理机构		代理人
主权项
地址

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