| 摘要 |
PURPOSE:To bore many holes at one time and to allow the correction of a work position by irradiating the work with laser beams of a prescribed shape via a desired number of the fine holes of a mask. CONSTITUTION:The plural points of the work W can be simultaneously bored by using a flyeye lens 6 and the mask 9 and by using the plural laser beams of a uniform light quantity and, therefore, the working efficiency of the boring is greatly improved. Since the laser beams are shaped via a beam shaping optical system 5, luminous fluxes can be reduced in the direction where the holes of the work W array and the directions orthogonal respectively with the axial directions of the laser beams and, therefore, the effect of increasing the density of the light energy passing the fine holes 9a of the mask 9 is obtd. in this case. |
