| 摘要 |
PURPOSE:To obtain a linear ultrasonic motor, which can control the driving speed of a slider, and a slide table employing the linear ultrasonic motor by providing a transmission rod to be secured to first and second piezoelectric oscillator and the slider which is brought into pressure contact with the transmission rod. CONSTITUTION:Upon application of a voltage, a first piezoelectric oscillator 1 is excited in a specific direction. At that time, a variable resistor is connected at a predetermined resistance determined by the resonance point of first and second piezoelectric oscillators 1, 2. Excitation of the first piezoelectric oscillator 1 causes an elliptical vibration on the surface of a transmission rod 3 thus producing a perfect rightward traveling wave which is then absorbed by the second piezoelectric oscillator 2. Consequently, a slider 4 is driven to the left and a table 5, interlocked with the slider 4, is driven linearly and stably at a constant speed while being guided by a linear guide 6. |
