DIRECTION-SENSITIVE FLOW-RATE INDICATOR,申请号EP19880201994-传众专利搜索

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发明名称	DIRECTION-SENSITIVE FLOW-RATE INDICATOR
摘要
申请公布号	EP0313120(B1)	申请公布日期	1991.11.21
申请号	EP19880201994	申请日期	1988.09.14
申请人	BRONKHORST HIGH-TECH B.V.	发明人	HUIJSING, JOHAN HENDRIK;VAN OUDSHEUSDEN, BASTIAAN WILLEM
分类号	G01F1/68;G01F1/684;G01F1/688;G01F1/69;G01P5/10;G01P5/12;G01P13/00;G01P13/02;H01L35/32	主分类号	G01F1/68
代理机构		代理人
主权项
地址

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