发明名称 |
Displacement measuring apparatus |
摘要 |
A displacement measuring apparatus comprises a scale relatively displaced to an irradiating beam, a reading head to read the scale by the irradiating beam, and control device to control the apparatus for avoiding substantially the leakage of the irradiating beam out of the apparatus in response to the positional error of the scale and the irradiating beam.
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申请公布号 |
US5066130(A) |
申请公布日期 |
1991.11.19 |
申请号 |
US19890347397 |
申请日期 |
1989.05.04 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
TSUKIJI, MASAAKI;NISHIMURA, TETSUHARU;ISHIZUKA, KOH;ISHII, SATOSHI;KUBOTA, YOICHI |
分类号 |
G01D5/38 |
主分类号 |
G01D5/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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