发明名称 PATTERN DEFECT INSPECTING DEVICE
摘要 PURPOSE:To simplify and miniaturize the device by allowing a scattered light of weak light intensity in the scattered light from a sample and a reference light to interfere to a photographic dryplate provided on a rear focal position of a lens and storing the scattered light as a hologram. CONSTITUTION:Light of a laser oscillator 1 is split into an object light 31 and a reference light 32 by a splitter 3. The object light 31 illuminates the whole sample 9 from an arbitrary angle through an expander 6, a regularly reflected light is excluded from an optical path by a trap 20, and a scattered light passes through a lens 10 and reaches a photographic dryplate 12. On the other hand, the reference light 32 is led into the dryplate 12 through a mirror 17, adjusted as to its intensity so as to interfere with a scattered light of weak light intensity and superposed, and recorded as a hologram. After the dryplate is developed, it is returned to its original position and the hologram is reproduced as an image. In such a way, by only making the hologram, a defect can be detected and the device is simplified and miniaturized.
申请公布号 JPH03249550(A) 申请公布日期 1991.11.07
申请号 JP19900048156 申请日期 1990.02.28
申请人 MITSUBISHI ELECTRIC CORP 发明人 MIYAZAKI YOKO;TANAKA HITOSHI;KOSAKA NORIYUKI;TOMOTA TOSHIMASA
分类号 G01N21/88;G01N21/956;G03H1/00;G06T1/00 主分类号 G01N21/88
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