PROCESS FOR THE MANUFACTURE OF A GAAS SEMICONDUCTOR ARRANGEMENT,申请号EP19810100732-传众专利搜索

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发明名称	PROCESS FOR THE MANUFACTURE OF A GAAS SEMICONDUCTOR ARRANGEMENT
摘要
申请公布号	EP0034729(B1)	申请公布日期	1991.10.30
申请号	EP19810100732	申请日期	1981.02.02
申请人	SIEMENS AKTIENGESELLSCHAFT	发明人	PETTENPAUL, EWALD DR.-ING. DIPL.-PHYS.;HUBER, JAKOB, DIPL.-PHYS.;WEIDLICH, HERBERT DR. RER. NAT. DIPL.-PHYS.
分类号	H01L29/80;H01L21/265;H01L21/285;H01L21/338;H01L29/36;H01L29/812;H01L29/872	主分类号	H01L29/80
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