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发明名称
VERFAHREN ZUM ANISOTROPEN AETZEN UND VORRICHTUNG ZU DESSEN DURCHFUEHRUNG
摘要
申请公布号
DE4105103(A1)
申请公布日期
1991.08.22
申请号
DE19914105103
申请日期
1991.02.19
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP
发明人
KAWAI, KENJI;AKAZAWA, MORIAKI;MARUYAMA, TAKAHIRO;OGAWA, TOSHIAKI;MORITA, HIROSHI, ITAMI, HYOGO, JP
分类号
H01L21/302;C23F4/00;H01L21/3065;H01L21/3213
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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