发明名称 |
Process for synthesizing diamond and diamond synthesis apparatus. |
摘要 |
<p>Disclosed is a process for synthesizing high quality diamond, at high speed, in a gas phase using carbon monoxide and hydrogen gas as starting gases, which comprises adding an oxygen-containing inorganic gas such as CO2 under conditions where graphite is produced unless the oxygen-containing inorganic gas is added. Also, disclosed is a process for consecutively synthesizing diamond on a plurality of substrates, which comprises placing a plurality of substrates (6) in a pre-chamber (4), moving each of the substrates into a reaction section (2), synthesizing diamond on the substrate, and then returning the substrate with a diamond film formed thereon to the pre-chamber. An apparatus adapted to practice the synthesis process is further disclosed.</p> |
申请公布号 |
EP0437704(A2) |
申请公布日期 |
1991.07.24 |
申请号 |
EP19900122357 |
申请日期 |
1990.11.23 |
申请人 |
IDEMITSU PETROCHEMICAL CO. LTD. |
发明人 |
HAYASHI,NARIYUKI,C/O IDEMITSU PETROCHEM.CO.LTD.;KATSUMATA,SATOSHI,C/O IDEMITSU PETROCHEM.CO.LTD. |
分类号 |
C30B25/14;C23C16/27;C23C16/54;C30B29/04 |
主分类号 |
C30B25/14 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|