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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03127851(A)
申请公布日期
1991.05.30
申请号
JP19890266457
申请日期
1989.10.13
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
UMIMOTO HIROYUKI
分类号
H01L21/76;H01L21/316
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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