Exposure apparatus.

摘要

An exposure apparatus includes an exposure light source (13) for projecting a flux of light (14) to be used for exposure, having a non-uniform intensity distribution, toward a range including an exposure zone, set with respect to a main body (40) of the exposure apparatus; illuminance detectors (61) disposed at least at two points inside the exposure light flux (16) but outside the exposure zone; and a detecting device (62) for detecting a change in intensity of the exposure light and a change in relative position of the exposure zone and the exposure light flux, on the basis of detected illuminances at the two points.