| 摘要 |
PURPOSE:To correct the direction of the beam of the gas laser accurately and automatically prior to use by detecting and correcting the deviation of the beam by a 1st four-divided photodiode, and then detecting and correcting the deviation of the beam passed through a condenser lens by a 2nd four-divided photodiode. CONSTITUTION:The beam B1 outputted by the gas laser L is reflected by a 1st mirror 3, a 2nd mirror 6, and a 1st half-mirror 7 to become a beam B4, which is converged by a condenser lens 8 into a small beam B5. Further, the beam is reflected by a 2nd half-mirror 9 to become a beam B6. Then when the 1st four-divided photodiode 10 detects the deviation of the beam 7, the beam B7 is adjusted by a 1st actuator 1 or 3rd actuator 4 so that its deviation is reduced. Then when the 2nd four-divided photodiode 11 detects the deviation of the beam B8, the deviation of the beam B8 is adjusted and reduced by a 2nd actuator 2 or 4th actuator 5. |
