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发明名称
PROCESSING OF INSULATING SILICON COMPOUND THIN FILM
摘要
申请公布号
JPH0312922(A)
申请公布日期
1991.01.21
申请号
JP19890148735
申请日期
1989.06.12
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
SATO MASAAKI;ARITA MUTSUNOBU
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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