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发明名称
SURFACE INSPECTING APPARATUS
摘要
申请公布号
JPH02306146(A)
申请公布日期
1990.12.19
申请号
JP19890126766
申请日期
1989.05.22
申请人
TOSHIBA CORP
发明人
AIZAWA KENJI
分类号
G01B11/30;G01N21/89;G01N21/892
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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