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发明名称
GAS CIRCUIT FOR ORGANIC METAL OF VAPOR GROWTH DEVICE
摘要
申请公布号
JPH02280317(A)
申请公布日期
1990.11.16
申请号
JP19890102024
申请日期
1989.04.21
申请人
FUJI ELECTRIC CO LTD
发明人
TABEI KOICHI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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