| 摘要 |
PURPOSE:To improve producibility and to reduce cost by mounting a disk manufacturing substrate on a pallet and transporting successively in plural vacuum chambers with corridors whose shapes are very similar to the shape of sectional area of the pallet, and then performing metallizing. CONSTITUTION:A pallet 2 is provided with a swelling part 2B for sealing whose shape is close to that of the corridor of each vacuum chamber, and a disk manufacturing substrate 1 is equipped on it. This pallet 2 is intruded into an entrance-side corridor 14 successively by the pressure of a hydraulic cylinder, etc., and then the swelling part 2B comes into contact with the internal wall of the corridor 14 to block it, so that an entrance preliminary vacuum chamber 3 and succeeding parts are evacuated by a vacuum pump. The pallet 2 is further intruded successively, and passed through an ion cleaning chamber 4 and a high- vacuum chamber 5, and in a metallizing chamber 6, a metal to be treated such as aluminum is applied with a high voltage under a high vacuum, thus performing a metallizing treatment. Consequently, successive work is carried out to improve the producibility and to reduce the cost. |
