| 摘要 |
PURPOSE:To increase the yield, by using a film made of an organic material for a spacer used to form a cubic cross part. CONSTITUTION:An aluminum electrode 2 is formed on a piezoelectric substrate 1. Then a film made of an organic material is coated over the entire substrate 1 to obtain a spacer 7. The openings 12 and 13 are formed based on the third electrode and a bonding pad pattern after coating a photoresist 11 over the entire substrate 1. Then the resist 11 and then the spacer are removed to form a cubic cross 16. The oxygen plasma is used to remove the spacer. As a result, a reed screen type converter of surface acoustic wave which has a cubic cross is produced without breaking the aluminum electrode. |
