MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE,申请号JP19890070618-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号	JPH02250321(A)	申请公布日期	1990.10.08
申请号	JP19890070618	申请日期	1989.03.24
申请人	HITACHI LTD	发明人	NISHIHARA SHINJI
分类号	H01L21/28	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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