| 摘要 |
PURPOSE:To improve durability of an equipment by a method wherein a pressure sensor formed by a semiconductor is fixed on a mount, this sensor is electrically coupled with a signal processing circuit with a conductive line and it is stored into a package case while the mount exhibits waterproof structure with a packing. CONSTITUTION:A silicon monocrystal plate 1 of a semiconductor material in a specific shape is used in a silicon diaphragm pressure sensor for detecting water pressure while a semiconductor resistor 3 is diffusion-formed on the surface of a formed diaphragm 2 wherein one of its surfaces is marked in a circle. This resistor 3 is formed at four points in the periphery of the diaphragm 2 with directions aligned, wherein their resistance values are formed approximately equal and a bridge circuit comprises these resistors 3. A sensor 8 thus constituted is fixed on a sensor mount 14, which is stored in a windshield glass 5a having a cover plate 26 as an external package while the mount 14 exhibits waterproof structure with a waterproof packing 15 to improve durability of pressure detecting structure. |
