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发明名称
AIR SUPPLYING DEVICE OF CLEAN ROOM FOR MAGNETIC DISK MANUFACTURING DEVICE
摘要
申请公布号
JPH02203137(A)
申请公布日期
1990.08.13
申请号
JP19890019572
申请日期
1989.01.31
申请人
NEC CORP
发明人
INADA KIYOHIKO
分类号
F24F5/00;F24F7/06
主分类号
F24F5/00
代理机构
代理人
主权项
地址
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