发明名称 |
Positive radiation-sensitive mixture and radiation-sensitive recording material produced therefrom |
摘要 |
A positive radiation-sensitive mixture is disclosed comprising a compound which forms an acid under the action of actinic radiation, and an acid-cleavable compound, the acid-cleavable compound producing, as cleavage product, an aromatically-substituted alcohol of the general formula I. The radiation-sensitive mixture according to the invention exhibits a wide processing latitude since different holding times do not cause any changes with respect to the development times. A high structural resolution is obtained with various developers <IMAGE> (I)
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申请公布号 |
US4946759(A) |
申请公布日期 |
1990.08.07 |
申请号 |
US19880243792 |
申请日期 |
1988.09.13 |
申请人 |
HOECHST AKTIENGESELLSCHAFT |
发明人 |
DOESSEL, KARL-FRIEDRICH;DAMMEL, RALPH;LINGNAU, JUERGEN |
分类号 |
C07C43/315;C07C43/32;C07C45/72;C07C49/84;G03C1/72;G03F7/004;G03F7/039;H01L21/027;H01L21/30;H05K3/06 |
主分类号 |
C07C43/315 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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