CHARGED BEAM DEVICE,申请号JP19890010588-传众专利搜索

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发明名称	CHARGED BEAM DEVICE
摘要
申请公布号	JPH02189916(A)	申请公布日期	1990.07.25
申请号	JP19890010588	申请日期	1989.01.18
申请人	NEC CORP	发明人	MATSUKURA HIROYUKI
分类号	G01B21/02;H01J37/04;H01J37/147;H01J37/305;H01L21/027;H01L21/30	主分类号	G01B21/02
代理机构		代理人
主权项
地址

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