| 摘要 |
PURPOSE:To protect a flexible board composed of a transparent polymer film from an environment in which amorphous silicon is deposited and, moreover, suppress the curling of the board by a method wherein a thin film made of silicon dioxide is formed on the one surface of the board. CONSTITUTION:A thin film made of silicon dioxide is formed on the one surface of a flexible board composed of a transparent polymer film and a transparent conductive film is formed on the other surface of the board. An amorphous silicon system semiconductor layer is formed on the transparent conductive film and a rear electrode layer is formed on the amorphous silicon system semiconductor layer. With this constitution, the board is protected from a high temperature environment in which the amorphous silicon is deposited and, moreover, curling caused by the contraction of the board film occurring when the board is taken out into a room temperature environment after the amorphous silicon is deposited can be suppressed. |
