| 摘要 |
<p>PURPOSE:To provide a sufficient seal for preventing the damage to a jointing part and improve working efficiency by providing a rotation introducer, in whose oscillation driving part, for introducing oscillatory motion into a vacuum chamber, a magnetic fluid seal is used. CONSTITUTION:A rotation introducer 10 applies a magnetic field in a clearance formed by a shaft and two ball pieces, and introduces a magnetic fluid into this clearance to achieve sealing action. A disk 3, oscillated by an oscillation driving part 50 supported by the introducer 10, is oscillated by the driving part 50 because the disk 3 is connected via an inner cylinder of the introducer 10, an inversion mechanism part 7, a driving shaft 4, and a motor 5. Further, a ball screw shaft 8a of an SY driving mechanism is rotated by a motor 9 and the shaft 8a is caused to project. Thus, a sufficient seal is achieved for oscillatory and rotational motion so that the damage to the joint can be prevented.</p> |
