摘要 |
<p>Herein disclosed are apparatuses for manufacturing compound semiconductor polycrystals comprises a pressure vessel, an upper shaft, a container for first component fixed to the upper shaft, a heater around the container, a lower shaft, a susceptor and a crucible for charging second component, a heater for the crucible and a communicating means for spatially connecting the container and the crucible optionally provided with a porous member at the lower extremity and/or a cylindrical member for confining a space over a part of melt surface contained in the crucible from the remaining inner space of the vessel, the apparatuses permitting the substantial reduction of reaction time and the improvement of the yield of the polycrystals due to the presence of the porous member and/or the cylindrical member separating the inner space of the vessel into two portions.</p> |