| 摘要 |
<p>PURPOSE:To use a wafer case in the whole process and reduce its manufacturing cost by making the wafer case airtight with a lid and providing a handle and a positioning pin. CONSTITUTION:A wafer case 1 is composed of the case equipped with a handle 4 and a positioning pin 5 as well as a lid for making the case 1 airtight. As it is thus used in the whole manufacturing process of a semiconductor device, the manufacturing cost of ICs is reduced and further, as the kind of its case is limited to one type, this case eliminates the need for transferring wafers to another case. This handling of the wafers reduces the manufacturing cost all the more and facilitates the automation of the manufacturing process as well.</p> |
