| 摘要 |
PURPOSE:To lower coefft. of friction by providing a protective carbon film by sputtering on a carbon material having <=2.0g/cm<3> density as a target. CONSTITUTION:The carbon material having <=2.0g/cm<3> density is used as the target for sputtering. Since the true density of graphite is 2.25g/cm<3>, the value is approximate to the true value. Such carbon material includes, for example, a pyrolytic graphite formed by a CVD method. The protective carbon film of 10 to 800Angstrom is formed by high-frequency sputtering in gaseous Ar under ordinary conditions. The substrate for the thin-film magnetic recording medium is constituted by forming a thin ferromagnetic film consisting of Co-Ni, etc., on an Al alloy. The coefft. of friction of the protective film is reduced according to this constitution. |
