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发明名称
PRETREATMENT METHOD FOR III-V COMPOUND SEMICONDUCTOR EPITAXIAL GROWTH ONTO SI
摘要
申请公布号
JPH0279421(A)
申请公布日期
1990.03.20
申请号
JP19880231717
申请日期
1988.09.14
申请人
NEC CORP
发明人
KIKUTA KUNIKO
分类号
C30B23/02;C30B29/40;H01L21/205;H01L21/302;H01L21/3065
主分类号
C30B23/02
代理机构
代理人
主权项
地址
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