| 摘要 |
PURPOSE:To improve strength and safety and to improve microwave heating efficiency by forming the vessel into the double structures consisting of a silicon nitride tray body for contg. an object to be treated and a stainless steel frame body for contg. the silicon nitride tray body. CONSTITUTION:The beginning end of a waveguide 2 is connected to a microwave transmitter 1 and the terminal of the waveguide 2 is connected to an oven 3. The vessel consists of a heating vessel 8 to be placed on a turn table 5, a supply port 9 for the object to be treated which supplies the object to be treated into the vessel 8 and is provided to a casing 4, a discharge pipe 10, etc. The silicon nitride tray body 13 having a recessed shape is put into a 1st frame constituting body 12 made of a stainless steel having a flange cover at the outer periphery of the top end. A spacing 15 is formed between the outer side of the tray body 13 and the inner side of the body 12. A buffer material 14 made of ceramics fibers of silica, alumina, etc., is partially interposed into this spacing 15. A gasket material 16 made of fluoroplastic is interposed between the flange cover 11 of the body 12 and the top end of the tray body 13 and the spacing 15 is closed by the flange cover 11. |
