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发明名称
FORMATION OF IMPURITY-CONTAINING REGION
摘要
申请公布号
JPH0252426(A)
申请公布日期
1990.02.22
申请号
JP19880203656
申请日期
1988.08.16
申请人
SONY CORP
发明人
TANAKA SOICHIRO
分类号
H01L21/8238;H01L21/266;H01L27/092
主分类号
H01L21/8238
代理机构
代理人
主权项
地址
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