| 摘要 |
PURPOSE:To keep the pressure of a muffle in a stable state by controlling the quantity of gas supplied into the muffle according to the pressure in the muffle. CONSTITUTION:Inert gas sent through a passage 3a of a gas supply mechanism 3, and a dehydrating agent, such as Cl2, sent through a passage 3b are supplied from a lower part of the muffle 2, and the pressure in the muffle 2 is measured by a pressure sensor 10 of a control mechanism 13 mounted in a branch pipe 2c to be converted into an electric signal, which is transmitted to a PID controller 11, and a control signal is issued from the controller 11 to a flow-rate controller 12, and the flow rate of the inert gas flowing through the passage 3a is controlled thereby. When the pressure in the muffle 2 is changed, the pressure sensor 10 of the control mechanism 13 detects the pressure change, and the gas supply quantity to the muffle 2 is controlled thereby so that the pressure in the muffle 2 is restored to a specified value. |
