发明名称 Method and arrangement for recording periodic signals with a laser probe
摘要 Method and arrangement for recording periodic signals with a laser probe. The application of stroboscopic methods in laser metrology requires the synchronization of the measuring arrangement (scanning laser microscope) with the periodic signal excited in the electronic component to be investigated. Since short laser pulses are very difficult to generate in response to a trigger signal, an attempt is made to derive the module clock from the pulse repetition rate of the laser. This type of synchronization requires complex apparatus particularly when the required clock frequency lies above the pulse repetition rate of the laser. In accordance with the present invention, therefore, a synchronization of the measuring arrangement and of the component is eliminated. In order to assign the proper point in time within the period of the signal to the measured values, the chronological spacing of the laser pulses allocated to the measured values are identified relative to a trigger signal that is synchronous with the signal to be recorded.
申请公布号 US4902963(A) 申请公布日期 1990.02.20
申请号 US19890295500 申请日期 1989.01.11
申请人 BRUST, HANS D. 发明人 BRUST, HANS D.
分类号 G01N23/22;G01R31/302;G01R31/308;G04F10/00 主分类号 G01N23/22
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