摘要 |
Method and arrangement for recording periodic signals with a laser probe. The application of stroboscopic methods in laser metrology requires the synchronization of the measuring arrangement (scanning laser microscope) with the periodic signal excited in the electronic component to be investigated. Since short laser pulses are very difficult to generate in response to a trigger signal, an attempt is made to derive the module clock from the pulse repetition rate of the laser. This type of synchronization requires complex apparatus particularly when the required clock frequency lies above the pulse repetition rate of the laser. In accordance with the present invention, therefore, a synchronization of the measuring arrangement and of the component is eliminated. In order to assign the proper point in time within the period of the signal to the measured values, the chronological spacing of the laser pulses allocated to the measured values are identified relative to a trigger signal that is synchronous with the signal to be recorded.
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