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发明名称
MANUFACTURE OF SILICON SUBSTRATE
摘要
申请公布号
JPH027437(A)
申请公布日期
1990.01.11
申请号
JP19880157326
申请日期
1988.06.24
申请人
NEC CORP
发明人
TOYOKAWA FUMITOSHI;SHISHIGUCHI SEIICHI;MIKAMI MASAO
分类号
H01L21/322
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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