THIN FILM FORMATION AND DEVICE THEREFOR,申请号JP19880153424-传众专利搜索

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发明名称	THIN FILM FORMATION AND DEVICE THEREFOR
摘要
申请公布号	JPH01321625(A)	申请公布日期	1989.12.27
申请号	JP19880153424	申请日期	1988.06.23
申请人	HITACHI LTD	发明人	WATANABE TAKESHI;TANAKA MASAHIRO;AZUMA KAZUFUMI;NAKATANI MITSUO;SONOBE TADASHI
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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