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发明名称
FORMATION OF SUPERCONDUCTING THIN FILM
摘要
申请公布号
JPH01308827(A)
申请公布日期
1989.12.13
申请号
JP19880139546
申请日期
1988.06.08
申请人
FUJITSU LTD
发明人
KIMURA TAKAAKI
分类号
C01G3/00;C01G1/00;C23C16/40;C23C16/56;H01B12/06;H01B13/00;H01L39/24
主分类号
C01G3/00
代理机构
代理人
主权项
地址
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VEHICLE
