| 摘要 |
PURPOSE:To reduce a noise and to prevent an electrode from being damaged and a gas from being deteriorated by a method wherein a second capacitor for main discharge use and a third capacitor for preliminary discharge use are installed separately and a preliminary discharge electrode is formed of a three-terminal discharge electrode. CONSTITUTION:When a high-speed switch 8 is in an OFF position, an electric charge from a high-voltage power supply 9 is accumulated in first and second capacitors 12, 13; when the high-speed switch 8 is in an ON position, the electric charge accumulated in the third capacitor 31 is supplied to a three-terminal discharge electrode 24; a preliminary discharge is caused and gas between main discharge electrode 2, 3 is ionized. Then, after the delay time set by a pulse delay element 30 has elapsed, the electric charge accumulated in the first capacitor 12 is transferred to a second capacitor 18 when a voltage on both ends of the second capacitor 18 reaches a firing voltage, a main discharge is caused between the main discharge electrodes 2, 3, a pulse laser beam is oscillated and output. By this setup, it is possible to obtain a pulse laser oscillation apparatus whose gas contamination and damage of a component are small and noise is low. |
