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发明名称
Gas feeding nozzle for a chemical vapor deposition apparatus
摘要
申请公布号
US4880163(A)
申请公布日期
1989.11.14
申请号
US19880149084
申请日期
1988.01.27
申请人
ASAHI GLASS COMPANY, LTD.
发明人
KOBAYASHI, SHIGEYOSHI;YABA, SUSUMU;TAKIGAWA, TOMOYA
分类号
C23C16/453
主分类号
C23C16/453
代理机构
代理人
主权项
地址
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