| 摘要 |
PURPOSE:To largely increase the thermal conductivity of sintered articles by subjecting HIP treatment of a product obtained by sintering formed AlN powder in a nitrogen atmosphere under a negative pressure. CONSTITUTION:A formed AlN powder is calcined in a nitrogen atmosphere under a negative pressure whereby a sintered product from which impurities are effectively removed is obtained. Then, the sintered product is subjected to HIP treatment at 1,600-1,900 deg.C under more than 100 atmospheric pressure, preferably in the presence of Al vapor. The calcination under a negative pres sure can give an AlN sintered product of higher transparency than that of conventional products. In addition, the HIP treatment of the sintered product after calcination under a negative pressure markedly densifies the product, increases the transparency and thermal conductivity. |
