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发明名称
OXIDATION OF INDIUM PHOSPHIDE SUBSTRATE
摘要
申请公布号
JPH01205535(A)
申请公布日期
1989.08.17
申请号
JP19880030372
申请日期
1988.02.12
申请人
NEC CORP
发明人
NOZAKI TADATOSHI;CHIN SHINGEN;OHATA KEIICHI
分类号
H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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