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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01202816(A)
申请公布日期
1989.08.15
申请号
JP19880027197
申请日期
1988.02.08
申请人
FUJI ELECTRIC CO LTD
发明人
ISHIDA SUESHIGE
分类号
H01L21/223;H01L21/265
主分类号
H01L21/223
代理机构
代理人
主权项
地址
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