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发明名称
METHOD OF PRODUCING PLANAR SEMICONDUCTOR DEVICES AND INTEGRATED CIRCUITS
摘要
申请公布号
SU1102416(A1)
申请公布日期
1989.08.07
申请号
SU19823519765
申请日期
1982.12.08
申请人
INSTFIZ POLUPROVODNIKOV SO AN SSSR;NOVOSIBIRSKIJ G UNIV IM.LENINSKOGO KOMSOMOLA
发明人
ASEEV A.L.,SU;GERASIMENKO N.N.,SU;KALININ V.V.,SU;FEDINA L.I.,SU
分类号
H01L21/263;H01L21/26
主分类号
H01L21/263
代理机构
代理人
主权项
地址
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