发明名称 |
Apparatus for analysis employing electron. |
摘要 |
<p>An analysis system in which air in a specimen exchange chamber is evacuated by an oil-sealed rotary vacuum pump and which employs electron incorporates a purge gas supply means at the inlet side of the oil-sealed rotary vacuum pump. The purge gas supply means supplies a small quantity of purge gas when the air in the specimen exchange chamber is evacuated to the almost ultimate pressure of the pump.</p> |
申请公布号 |
EP0321925(A2) |
申请公布日期 |
1989.06.28 |
申请号 |
EP19880121303 |
申请日期 |
1988.12.20 |
申请人 |
HITACHI, LTD. |
发明人 |
TSUTSUMI, YOSHITSUGU;UEDA, SHINJIRO;OTAKA, TADASHI |
分类号 |
H01J37/18;G01N23/225;F04C25/02;H01J49/24 |
主分类号 |
H01J37/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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