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发明名称
APPARATUS FOR PLASMA TREATMENT
摘要
申请公布号
JPH01152627(A)
申请公布日期
1989.06.15
申请号
JP19870029461
申请日期
1987.02.10
申请人
ELECTRO-PLASMA INC
发明人
ERITSUKU ENUEMUAI MIYUURUBAAGAA
分类号
H01L21/302;B05B7/22;C23C14/22;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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