发明名称 Wiring arrangement for semiconductor devices
摘要 A semiconductor integrated circuit with a wiring arrangement for high integration density. The arrangement is dispersed on a semiconductor substrate with a first wiring portion formed on the substrate and a second wiring portion formed on the substrate at a location adjacent to one edge of the first wiring portion. The first wiring portion has a groove or a plurality of indentations formed therein, preferably in the vicinity of the edge thereof that is closer to the second wiring portion, for preventing short-circuiting between the first and second wiring portions through parts of the edge of the first wiring portion which have expanded during a heat treatment.
申请公布号 US4835591(A) 申请公布日期 1989.05.30
申请号 US19870138949 申请日期 1987.12.29
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 MATSUKAWA, TAKAYUKI
分类号 H01L23/528 主分类号 H01L23/528
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