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发明名称
METAL ION SOURCE
摘要
申请公布号
JPH01112639(A)
申请公布日期
1989.05.01
申请号
JP19870270680
申请日期
1987.10.27
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
YOSHIDA ZENICHI
分类号
H01J27/16;H01J27/08;H01J27/22;H01J37/08
主分类号
H01J27/16
代理机构
代理人
主权项
地址
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