| 摘要 |
<p>PURPOSE:To make it possible to convey safely a substrate without generating failure and so on due to a collision with a housing part and so on at the time of conveyance by a method wherein the substrate is positioned at a prescribed position to its conveying direction prior to the conveyance of the substrate to the housing part or a measuring part. CONSTITUTION:It is assumed to have been detected by sensors 6 that the center C1 of a substrate 10 is shifted by (x) and (y) in X and Y directions to the center C0 of a placing stand 34 and moreover, the side edge of the substrate 10 has an angle thetato the conveying direction. The substrate 10 is again held by a vacuum pincette 33 and after the pincette 33 is moved in the vertical (up) direction in that state, a control part 5 makes a horizontal stage 35 drive by the (x) in the X direction and by the (y) in the Y direction on the basis of the detected signals of the sensors 6 to make the C1 of the substrate 10 coincide with the center C0 of the stand 34. Then, the pincette is descended to release its holding, a rotating stage 37 of the stand 34 is driven by a shifted amount theta and the substrate 10 is positioned in such a way that the side edge of the substrate 10 and the conveying direction are brought to a prescribed relation between them. Thereby, the substrate 10 can be housed without hitting against the sidewall of a carrier B.</p> |
