| 摘要 |
PURPOSE:To highly accurately recognize the shape of a body which is the object of recognition by constituting the titled device so that a shape of such as a wiring pattern, etc. is recognized by using plural operators different in resolution. CONSTITUTION:The plural operators 30A-30C whose resolutions are different from each other, shape recognizing modules 31A-31C corresponding to said operators, and a shape decision module 41 that decides the shape of an object i.e. the object of recognition by selectively using said modules are provided. To recognize the shape or a defect of a wiring pattern, first, the coarse shape is recognized by using a coarse operator, depending on the result, minute recognition is executed by selectively using an intermediate operator or a fine operator. As a result, the overlooking a defect or an excessive detection due to a micro- viewing recognition can be prevented, to attain accurate recognition. |
