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发明名称
摘要
申请公布号
JPH0115134(B2)
申请公布日期
1989.03.15
申请号
JP19810011086
申请日期
1981.01.28
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
MIZUTANI YOSHIHISA
分类号
H01L21/20;H01L21/265;H01L21/268;H01L21/762;H01L21/86
主分类号
H01L21/20
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