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发明名称
CONSTITUTION OF SEMICONDUCTOR IMAGE POSITION DETECTING ELEMENT AND IMAGE POSITION DETECTING METHOD
摘要
申请公布号
JPS6410108(A)
申请公布日期
1989.01.13
申请号
JP19870165969
申请日期
1987.07.02
申请人
RIKAGAKU KENKYUSHO
发明人
IDESAWA MASANORI
分类号
H01L21/66;G01B11/00;G01C3/06;H01L27/144
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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