发明名称 INTEGRATED CIRCUIT
摘要 PURPOSE:To reduce the area to be occupied by a load resistor and thereby to enhance device integration by a method wherein the load resistor is made of SiC. CONSTITUTION:An integrated circuit of this design is provided with a load resistor built of silicon carbide (SiC), with the beta-SiC, among others, equipped with a band gap energy Eg of 2.2eV, which is higher than that of the conventional resistor silicon which is 1.12eV. In this design, accordingly, a higher resistance may be attained with ease than in a design using polycrystalline silicon, which results in less change in resistance attributable to a rise in temperature. This design reduces the area to be occupied by a resistance body, enhancing device integration.
申请公布号 JPS647549(A) 申请公布日期 1989.01.11
申请号 JP19870161123 申请日期 1987.06.30
申请人 FUJITSU LTD 发明人 FURUMURA YUJI;MIENO FUMITAKE;SUZUKI TAKAAKI;TOKI MASAHIKO
分类号 H01L27/04;H01L21/822;H01L27/08 主分类号 H01L27/04
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